High-temperature piezoresistive C / SiOC sensors
نویسندگان
چکیده
منابع مشابه
Offset stable piezoresistive high-temperature pressure sensors based on silicon
The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason a silicon-based pressure sensor with an application temperature ranging up to 300 C and the associated manufacturing technology was developed. With ...
متن کاملComments on ‘‘Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors’’
This comment is on the paper ‘‘Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors’’, by Riedel et al. The experimental method of testing the piezoresistive behavior is flawed in this paper, as explained below. A similar flaw exists in Zhang et al. which is referenced by the subject paper. Due to this flaw, the piezoresistive results are not reliable. Piezoresistivity refers ...
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The typical layout in a piezoresistive tactile sensor arranges individual sensors to form an array with M rows and N columns. While this layout reduces the wiring involved, it does not allow the values of the sensor resistors to be measured individually due to the appearance of crosstalk caused by the nonidealities of the array reading circuits. In this paper, two reading methods that minimize ...
متن کاملPaper-based piezoresistive MEMS sensors.
This paper describes the development of MEMS force sensors constructed using paper as the structural material. The working principle on which these paper-based sensors are based is the piezoresistive effect generated by conductive materials patterned on a paper substrate. The device is inexpensive (∼$0.04 per device for materials), simple to fabricate, lightweight, and disposable. Paper can be ...
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Rectal manometry provide a useful method to objectively assess the physiology of defecation. We developed a probe with 10 embedded transducers for evaluating the dynamic rectal pressure profile. The innovation of the probe is to use small piezoresistive dice and reduce the packaging resulting in a very small assembly. The diameter of the probe is 9 mm with a length of 20 cm. The length could be...
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ژورنال
عنوان ژورنال: Journal of Sensors and Sensor Systems
سال: 2015
ISSN: 2194-878X
DOI: 10.5194/jsss-4-133-2015